Metallurgical High Vacuum ships stainless chambers

Metallurgical High Vacuum (MHV) has shipped two chambers for customer-specific applications. One vacuum chamber is over 72in high and will be used in P E. Chemical Vapor Deposition. The other chamber is a 12in square design that will be used to weld silicon sticks, complete with a two-stage booster vacuum pumping system. Both chambers are built of type 304 stainless steel for the demands of the applications. The companies vacuum leak testing showed that both of these chambers had background leak rates in the low 10-9cc/sec range, which is an infinitesimal 0.06cc/yr. MHV tested each chamber blanked off and pumped down with a 1300CFM blower/300 CFM mechanical pump (Stokes 1722 package). The final leak check was done using an Inficon UL-1000 helium leak detector.

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